4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Shinji Kajita

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Apparatus for and method of processing substrate

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Reexamination Certificate

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Method and apparatus for forming thin film of metal

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2891324

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