4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Shingo Hishiya

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Method and apparatus for forming insulating film containing...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Method and apparatus for processing organosiloxane film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method and apparatus for processing organosiloxane film

Semiconductor device manufacturing: process – Including control responsive to sensed condition
Reexamination Certificate

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Method and apparatus for treating article to be treated

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate

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Oxide film forming method

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Profile ID: LFUS-PAI-P-2786610

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