4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Shingo Furui

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Cleaning method and plasma processing method

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Plasma processing method

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2320862

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