Cleaning method and plasma processing method

Details Cleaning method and plasma processing method Cleaning method and plasma processing method

2006-01-23

2011-10-11

Markoff, Alexander (Department: 1711)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

C134S001000, C134S022180, C134S026000, C134S030000, C438S905000

Reexamination Certificate

active

08034183

ABSTRACT:
In a RLSA microwave plasma processing apparatus that radiates microwave from a microwave generator into a chamber by using a planer antenna (Radial Line Slot Antenna) having many slots formed according to a certain pattern, the chamber contaminated with Na or the like is cleaned by using a cleaning gas containing H2and O2.

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International Search Report (Form PCT/ISA/210) in connection with PCT/JP2006/300957, dated Apr. 2005.

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