4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Shin-Yi Tsai

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Dual damascene processing method using silicon rich oxide...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Fabrication method for forming rounded corner of contact...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for reducing dimensions between patterns on a hardmask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for reducing dimensions between patterns on a hardmask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for reducing dimensions between patterns on a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2389982

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