4. Optics: measuring and testing
  5. By polarized light examination
  6. With light attenuation

Shin-Etsu Handotai Co.

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Apparatus for measuring surface shape

Optics: measuring and testing – By polarized light examination – With light attenuation
Patent

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Method for producing single crystal and pulling device

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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Process for manufacturing silicon epitaxial wafer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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