Apparatus for measuring surface shape

Details Apparatus for measuring surface shape Apparatus for measuring surface shape

1995-07-05

1997-06-03

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

356376, G01B 1130

Patent

active

056360231

ABSTRACT:
An apparatus of measuring a surface shape, which enables the surface shape of a sample to be accurately and quantitatively measured by a simple procedure, is provided. A sample 1 is placed on a sample stage 3, a light is projected by an optical system 8 on the sample 1, the sample stage 3 is tilted at intervals of a unit angle and on the basis of a prescribed surface by a motor 6, a reflected light from the sample 1 is received by a CCD 16, and an operational analysis circuit 21, in response to a command from a CPU 17 and based on the data of light reception obtained by the CCD 16 at intervals of a unit tilting angle, performs an operational analysis on the surface shape of the sample.

REFERENCES:
patent: 3484150 (1969-12-01), Taoka et al.
patent: 3782827 (1974-01-01), Nisenson et al.
patent: 3791956 (1974-02-01), Jakeman
patent: 3850528 (1974-11-01), Corey
patent: 3857637 (1974-12-01), Obenreder
patent: 4548506 (1985-10-01), Elson
patent: 4818108 (1989-04-01), Eppinger

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