4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Diffusing a dopant

Shih Bin Peng

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Method of forming poly plug to reduce buried contact series resi

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
Patent

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Poly plug to reduce buried contact series resistance

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent

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Profile ID: LFUS-PAI-P-394301

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