4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Shigeru Mizuno

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Chemical vapor deposition apparatus

Coating processes – Coating by vapor – gas – or smoke
Patent

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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CVD apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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CVD apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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CVD apparatus

Coating apparatus – Solid member or material acting on coating after application – Rotary member
Patent

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Profile ID: LFUS-PAI-P-198117

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