Machine element or mechanism – Control lever and linkage systems – Multiple controlling elements for single controlled element
Patent
1980-04-07
1983-10-18
Zugel, Francis K.
Machine element or mechanism
Control lever and linkage systems
Multiple controlling elements for single controlled element
108143, 248657, 269 60, G05G 1100, A47B 1100
Patent
active
044098600
ABSTRACT:
In an apparatus for precisely moving a table, rectilinear drive systems for both X- and Y-axes are fixed to a support frame, a movable stage is constructed so as to have its motion in the direction of one of these axes constrained by the motion of the rectilinear drive system for the one axis and to have its motion in the direction of the other axis constrained by the rectilinear motion of the rectilinear drive system for the other axis, and means for coupling the rectilinear drive system for at least one of the axes and the movable stage so as to have a backlash.
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Harada Tatsuo
Ito Masaaki
Moriyama Shigeo
Hitachi , Ltd.
Zugel Francis K.
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