4. Semiconductor device manufacturing: process
  5. With measuring or testing

Shigeki Nojima

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Aligner evaluation system, aligner evaluation method, a...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Aligner evaluation system, aligner evaluation method, a...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Apparatus for correcting a plurality of exposure tools,...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Design layout preparing method

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Integrated circuit pattern designing method, exposure mask...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2112421

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