Apparatus for correcting a plurality of exposure tools,...

Details Apparatus for correcting a plurality of exposure tools,... Apparatus for correcting a plurality of exposure tools,...

2007-01-16

2007-01-16

Bahta, Kidest (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S182000, C430S030000

Reexamination Certificate

active

10965162

ABSTRACT:
An apparatus for correcting a plurality of exposure tools has an image memory configured to store images projected by the exposure tools, a contrast evaluator configured to rank the exposure tools based on contrasts of the images, an evenness evaluator configured to determine whether optical proximity effects of the exposure tools are equivalent or not based on the images, and an exposure tool controller configured to adjust each contrast of the images projected by the exposure tools so that all optical proximity effects of the exposure tools is equivalent to an optical proximity effect of the lowest ranked exposure tool having the lowest contrast.

REFERENCES:
patent: 6008880 (1999-12-01), Higashiki et al.
patent: 6334209 (2001-12-01), Hashimoto et al.
patent: 2004/0088071 (2004-05-01), Kouno et al.
patent: 2634037 (1997-04-01), None
patent: 10-172878 (1998-06-01), None
patent: 2001-144009 (2001-05-01), None
patent: 2003-031468 (2003-01-01), None

Affiliated with

Also associated with

Rating

Apparatus for correcting a plurality of exposure tools,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for correcting a plurality of exposure tools,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for correcting a plurality of exposure tools,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3819639