4. Measuring and testing
  5. Miscellaneous

Shifang Zhou

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Mechanical isolation for MEMS devices

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – For plural devices
Reexamination Certificate

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Z offset MEMS devices and methods

Measuring and testing – Miscellaneous
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3198476

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