Z offset MEMS devices and methods

Details Z offset MEMS devices and methods Z offset MEMS devices and methods

2006-12-13

2009-02-10

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Miscellaneous

C438S466000

Reexamination Certificate

active

07487678

ABSTRACT:
A microelectromechanical system (MEMS) device with a mechanism layer and a base. The top surface of the base is bonded to the mechanism layer and defines a gap in the top surface of the base. A portion of the mechanism layer is deflected into the gap until it contacts the base, and is bonded to the base.

REFERENCES:
patent: 5666258 (1997-09-01), Gevatter et al.
patent: 2004/0036132 (2004-02-01), de los Santos
patent: 2005/0002079 (2005-01-01), Novotny et al.
patent: 2005/0074919 (2005-04-01), Patel et al.
patent: 2005/0264452 (2005-12-01), Fujishima et al.

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