Mechanical isolation for MEMS devices

Details Mechanical isolation for MEMS devices Mechanical isolation for MEMS devices

2007-12-27

2010-11-09

Clark, S. V (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

For plural devices

C257S723000

Reexamination Certificate

active

07830003

ABSTRACT:
A device according to the present invention includes a MEMS device supported on a first side of a die. A first side of an isolator is attached to the first side of the die. A package is attached to the first side of the isolator, with at least one electrically conductive attachment device attaching the die to the isolator and attaching the isolator to the package. The isolator may include isolation structures and a receptacle.

REFERENCES:
patent: 6768196 (2004-07-01), Harney et al.
patent: 6946742 (2005-09-01), Karpman
patent: 7166911 (2007-01-01), Karpman et al.
patent: 2004/0041254 (2004-03-01), Long et al.
patent: 2005/0189635 (2005-09-01), Humpston et al.
patent: 2007/0170525 (2007-07-01), Eskridge
patent: 2009/0282915 (2009-11-01), Ohta et al.

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