4. Electric heating
  5. Metal heating
  6. By arc

Shiang-Bau Wang

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Etching process to avoid polysilicon notching

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Gas distribution plate electrode for a plasma reactor

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Gas distribution plate electrode for a plasma receptor

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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In-situ critical dimension measurement

Optics: measuring and testing – By light interference – For dimensional measurement
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Inductive antenna for a plasma reactor producing reduced...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Profile ID: LFUS-PAI-P-2046856

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