4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. Grooved and refilled with deposited dielectric material

Sheng-Wei Yang

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Method for fabricating trench isolation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
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Method for fabricating trench isolations with high aspect ratio

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Method for forming a self-aligned buried strap in a vertical...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method for forming a self-aligned buried strap in a vertical...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method for isolation layer for a vertical DRAM

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Profile ID: LFUS-PAI-P-2816597

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