Rotating gripper wafer flipper

Details Rotating gripper wafer flipper Rotating gripper wafer flipper

2005-08-30

2005-08-30

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S765010

Reexamination Certificate

active

06937005

ABSTRACT:
A method for inspecting semiconductor wafers. Specifically, an arm which is constructed to hold a wafer, is mounted on a rotational device to provide a user with the means of inspecting a wafer in any position without having to physically touch the wafer or move the wafer to another inspection station. The arm provides rotation about an axis parallel to the surface of the wafer, as well as rotation about an axis run which is perpendicular to the surface of the wafer and extends through the axial center of the wafer.

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Ultracision, Inc. “Inspection Gimbal Assembly” Mar. 19, 1999.
Olympus“Inspection and Transfer System” 1999.
Nikon “Inspection and Transfer System” 1999.
Ontrak Systems “Synergy Performa” Mar. 19, 1999.
Ontrak Systems “Synergy Integra” Mar. 19, 1999.

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