4. Coherent light generators
  5. Particular active media
  6. Gas

Shahryar Rokni

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Automatic fluorine control system

Coherent light generators – Particular active media – Gas
Patent

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Fluorine control system for excimer lasers

Coherent light generators – Particular active media – Gas
Patent

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Four KHz gas discharge laser

Coherent light generators – Particular active media – Gas
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Four KHz gas discharge laser system

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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Lithography laser with beam delivery and beam pointing control

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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Profile ID: LFUS-PAI-P-756468

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