Coherent light generators – Particular active media – Gas
Patent
1998-01-30
1999-11-02
Lee, John D.
Coherent light generators
Particular active media
Gas
372 57, 372 59, H01S 3225
Patent
active
059784067
ABSTRACT:
An excimer laser with a laser gas containing fluorine in which the fluorine concentration is maintained continuously at or substantially at desired predetermined levels. A real time or substantially real time fluorine monitor provides a feedback signal to a fluorine flow control system which provides continuous fluorine injection flow into the laser chamber to precisely compensate for fluorine depletion and maintain fluorine concentration precisely at desired levels. In a preferred embodiment, fluorine detector which may be a chemical detector periodically measures the fluorine concentration in laser gas discharged from the laser in order to calibrate the real time or substantially real time fluorine monitor. In a second preferred embodiment, the continuous inlet flow is from two gas sources, one containing fluorine, a noble gas and a buffer gas and the other containing only the noble gas and the buffer gas. In a third embodiment, the continuous inlet flow is from a gas source containing fluorine, a noble gas and a buffer gas and filtered gas discharged from the laser.
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Rokni Shahryar
Tammadge David J.
Watson Tom A.
Cymer Inc.
Lee John D.
Ross, Esq. John R.
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