Fluorine control system for excimer lasers

Coherent light generators – Particular active media – Gas

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372 57, 372 59, H01S 3225

Patent

active

059784067

ABSTRACT:
An excimer laser with a laser gas containing fluorine in which the fluorine concentration is maintained continuously at or substantially at desired predetermined levels. A real time or substantially real time fluorine monitor provides a feedback signal to a fluorine flow control system which provides continuous fluorine injection flow into the laser chamber to precisely compensate for fluorine depletion and maintain fluorine concentration precisely at desired levels. In a preferred embodiment, fluorine detector which may be a chemical detector periodically measures the fluorine concentration in laser gas discharged from the laser in order to calibrate the real time or substantially real time fluorine monitor. In a second preferred embodiment, the continuous inlet flow is from two gas sources, one containing fluorine, a noble gas and a buffer gas and the other containing only the noble gas and the buffer gas. In a third embodiment, the continuous inlet flow is from a gas source containing fluorine, a noble gas and a buffer gas and filtered gas discharged from the laser.

REFERENCES:
patent: 4674099 (1987-06-01), Turner
patent: 4722090 (1988-01-01), Haruta et al.
patent: 4977749 (1990-12-01), Sercel
patent: 5005180 (1991-04-01), Edelman et al.
patent: 5005181 (1991-04-01), Yoshioka et al.
patent: 5017499 (1991-05-01), Hakuta et al.
patent: 5090020 (1992-02-01), Bedwell
patent: 5149659 (1992-09-01), Hakuta et al.
patent: 5199267 (1993-04-01), Mitsui
patent: 5377215 (1994-12-01), Das et al.
patent: 5440578 (1995-08-01), Sandstrom

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