Automatic fluorine control system

Details Automatic fluorine control system Automatic fluorine control system

1998-07-02

2000-02-22

Lee, John D.

Coherent light generators

Particular active media

Gas

372 57, 372 59, H01S 3225

Patent

active

060288809

ABSTRACT:
An excimer laser system with a fluorine control having a fixed volume inject bottle in which fluorine is injected prior to it being injected into the laser chamber. A manifold and feedback control system is provided to permit precise injection at rates approaching continuous fluorine injection. The system permits the laser to be operated in a small sweet spot as measured by a narrow range of charging voltage.

REFERENCES:
patent: 4031484 (1977-06-01), Freiberg et al.
patent: 4429392 (1984-01-01), Yoshida et al.
patent: 4722090 (1988-01-01), Haruta et al.
patent: 4740982 (1988-04-01), Hakuta et al.
patent: 4831332 (1989-05-01), Rudisill et al.
patent: 4893108 (1990-01-01), Kolesar, jr.
patent: 5005180 (1991-04-01), Edelman et al.
patent: 5005181 (1991-04-01), Yoshioka et al.
patent: 5017499 (1991-05-01), Hakuta et al.
patent: 5064140 (1991-11-01), Neuburger
patent: 5073896 (1991-12-01), Reid et la.
patent: 5090020 (1992-02-01), Bedwell
patent: 5149659 (1992-09-01), Hakuta et al.
patent: 5377215 (1994-12-01), Das et al.
patent: 5440578 (1995-08-01), Sandstrom
patent: 5450436 (1995-09-01), Mizoguchi et al.
patent: 5642374 (1997-06-01), Wakabayashi et al.

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