4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Seyed Jafar Jafarian-Tehrani

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Dynamic feedback electrostatic wafer chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Method for toolmatching and troubleshooting a plasma...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Method for toolmatching and troubleshooting a plasma...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Methods and apparatuses for controlling phase difference in plas

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Methods and array for creating a mathematical model of a...

Electric heating – Metal heating – By arc
Reexamination Certificate

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Profile ID: LFUS-PAI-P-430490

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