4. Optical: systems and elements
  5. Optical modulator
  6. Light wave temporal modulation

Seth Miller

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Lubricating micro-machined devices using fluorosurfactants

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Lubricating micro-machined devices using fluorosurfactants

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate

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Lubricating micro-machined devices using fluorosurfactants

Coating processes – Spraying
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Method for lubricating MEMS components

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Re-coating MEMS devices using dissolved resins

Coating processes – Centrifugal force utilized
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Profile ID: LFUS-PAI-P-2734962

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