Lubricating micro-machined devices using fluorosurfactants

Details Lubricating micro-machined devices using fluorosurfactants Lubricating micro-machined devices using fluorosurfactants

2007-11-06

2007-11-06

Bashore, Alain L. (Department: 1762)

Coating processes

Spraying

C427S427400, C427S427500, C438S038000

Reexamination Certificate

active

10186411

ABSTRACT:
A method of lubricating MEMS devices using fluorosurfactants42. Micro-machined devices, such as a digital micro-mirror device (DMD™)940, which make repeated contact between moving parts, require lubrication in order to prevent the onset of stiction (static friction) forces significant enough to cause the parts to stick irreversibly together, causing defects. These robust and non-corrosive fluorosurfactants42, which consists of a hydrophilic chain40attached to a hydrophobic fluorocarbon tail41, are applied by nebulization and replace the more complex lubricating systems, including highly reactive PFDA lubricants stored in polymer getters, to keep the parts from sticking. This lubrication process, which does not require the use of getters, is easily applied and has been shown to provide long-life, lower-cost, operable MEMS devices.

REFERENCES:
patent: 3790080 (1974-02-01), Babington
patent: 4224173 (1980-09-01), Reick

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