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Seong-sue Kim

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Apparatus and method for measuring aerial image of EUV mask

Optical: systems and elements – Diffraction – From zone plate
Reexamination Certificate

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Apparatus and method for recording mark

Dynamic information storage or retrieval – Specific detail of information handling portion of system – Radiation beam modification of or by storage medium
Reexamination Certificate

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Method and apparatus for recording data on optical recording...

Dynamic information storage or retrieval – Condition indicating – monitoring – or testing – Including radiation storage or retrieval
Reexamination Certificate

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Method and apparatus for recording data on optical recording...

Dynamic information storage or retrieval – Binary pulse train information signal – Binary signal processing for controlling recording light...
Reexamination Certificate

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Method of and apparatus for recording data on an optical...

Dynamic information storage or retrieval – Binary pulse train information signal – Binary signal processing for controlling recording light...
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Profile ID: LFUS-PAI-P-2471728

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