4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Non-single crystal, or recrystallized, semiconductor...
  6. Amorphous semiconductor material

Semicoductor Energy Laboratory Co., Ltd.

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Nonsingle crystal semiconductor and a semiconductor device using

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material
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Thin film transistor and semiconductor device and method for for

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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