Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material
Patent
1991-05-01
1995-02-21
Jackson, Jerome
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Amorphous semiconductor material
257 65, 257 57, 257 66, H01L 2978, H01L 2904
Patent
active
053918932
ABSTRACT:
A semiconductor device including a conductive substrate or a first conductive layer formed on the substrate, a non-single-crystal semiconductor layer member is disposed on the conductive substrate or the conductive layer, the non-single-crystal semiconductor layer member having at least one intrinsic, non-single-crystal semiconductor layer, and a second conductive layer disposed on the non-single-crystal semiconductor layer. The intrinsic non-single-crystal semiconductor layer contains sodium and oxygen in very low concentrations where each concentration is 5.times.10.sup.18 atoms/cm.sup.3 or less.
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Schmidt P. F., J. Electrochem. Soc.: Solid-State Science And Technology Jan. 1983 pp. 196-199. "Contamination-Free . . . Materials."
Jackson Jerome
Semicoductor Energy Laboratory Co., Ltd.
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