4. Semiconductor device manufacturing: process
  5. With measuring or testing

Scott Jessen

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Abnormal photoresist line/space profile detection through...

Measuring and testing – Inspecting
Reexamination Certificate

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Mask layer and dual damascene interconnect structure in a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method analyzing a semiconductor surface using line width...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Method of focused ion beam pattern transfer using a smart...

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Method of monitoring a patterned transfer process using line...

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2037464

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