Wave transmission lines and networks – Coupling networks – Electromechanical filter
Patent
1995-06-23
1997-06-17
Lee, Benny
Wave transmission lines and networks
Coupling networks
Electromechanical filter
333186, 333191, 361278, 3612831, 361287, H03H 9205
Patent
active
056401337
ABSTRACT:
A tunable electromicromechanical resonator structure incorporates an electrostatic actuator which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers. One set is mounted on a movable portion of the resonator structure and one set is mounted on an adjacent fixed base on substrate, with the fingers in opposed relationship and their adjacent ends spaced apart by a gap. An adjustable bias voltage across the sets of electrodes adjusts the resonant frequency of the movable structure.
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Adams Scott G.
Bertsch Fred M.
MacDonald Noel C.
Shaw Kevin A.
Cornell Research Foundation Inc.
Gambino Darius
Lee Benny
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