4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Scott Briggs

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Etching a metal hard mask for an integrated circuit structure

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Negative bias critical dimension trim

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2850199

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