Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate
2006-08-01
2006-08-01
Parker, Kenneth (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Including dielectric isolation means
C257S758000, C257S021000, C257S021000, C257S023000
Reexamination Certificate
active
07084479
ABSTRACT:
In a multilevel microelectronic integrated circuit, air comprises permanent line level dielectric and ultra low-K materials are via level dielectric. The air is supplied to line level subsequent to removal of sacrificial material by clean thermal decomposition and assisted diffusion of byproducts through porosities in the IC structure. Optionally, air is also included within porosities in the via level dielectric. By incorporating air to the extent produced in the invention, intralevel and interlevel dielectric values are minimized.
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Chen Shyng-Tsong
Chiras Stefanie Ruth
Colburn Matthew Earl
Dalton Timothy Joseph
Hedrick Jeffrey Curtis
Fenty Jesse A.
Parker Kenneth
Scully , Scott, Murphy & Presser, P.C.
Trepp, Esq. Robert M.
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