Satoru Anzai

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Automatic magnification correcting system in a projection optica

Optics: image projectors – Lens support – Lens position adjustable
Patent

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Double-conjugate maintaining optical system

Optics: measuring and testing – Range or remote distance finding – With photodetection
Patent

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Exposure method and system for photolithography

Photocopying – Projection printing and copying cameras – Step and repeat
Patent

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Light irradiation control method for projection exposure apparat

Photocopying – Projection printing and copying cameras – Step and repeat
Patent

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Method and apparatus for adjusting imaging performance of projec

Patent

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Profile ID: LFUS-PAI-P-808348

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