Patent
1987-11-12
1989-10-03
Arnold, Bruce Y.
350413, G02B 106, G02B 710
Patent
active
048712370
ABSTRACT:
In a method and apparatus for highly precisely adjusting the optical performance including the imaging plane and the magnification factor of a projection lens in a projection optical apparatus, adjustment of the projection lens is achieved by changing the barometric pressure, i.e., the refractive index of at least one space which is located on an optical path and which is shielded from the outer atmosphere is changed by changing the barometric pressure therein. At this space, a space or gap present between any two adjacent elements of a plurality of lens elements or a group of lenses constituting a projection lens is preferably selected. The selected space is independent from and is shielded from the outer atmosphere by the lenses defining itself and a housing supporting these lenses, and is filled with air or a gas. The pressure of the air or gas inside the independent space is controlled by a barometric controller.
REFERENCES:
patent: 3498695 (1970-03-01), Brouwer
patent: 3528727 (1970-09-01), Halliday
patent: 4331388 (1982-05-01), McCrobie et al.
Rees, "Technique for Varying Focal Length of a Lens", Xerox Disclosure Journal, vol. 1, Nos. 11/12, 11/12-76, pp. 61-62.
Anzai Satoru
Ohno Koichi
Arnold Bruce Y.
Gass Rebecca D.
Nikon Corporation
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