4. Coating apparatus
  5. Gas or vapor deposition
  6. Having means to expose a portion of a substrate to coating...

Sasson R. Somekh

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Buffer station for wafer backside cleaning and inspection

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
Reexamination Certificate

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End point detection for sputtering and resputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Semiconductor processing system with robotic autoloader and load

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Semiconductor processing system with robotic autoloader and load

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Semiconductor processing system with robotic autoloader and load

Handling: hand and hoist-line implements – Grapple – Slideable jaws
Patent

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