Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1991-12-30
1993-07-06
Werner, Frank E.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
118719, 20429825, 414732, 414917, 414225, 414626, 2941191, B65G 6500
Patent
active
052248097
ABSTRACT:
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.
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Solid State Technology article entitled "Wafer Handling Robot", Equipment Frontiers section, Jan., 1985.
Abolnikov Edward M.
Catlin, Jr. Richard M.
Cheng David
Lowrance Robert B.
Maydan Dan
Applied Materials Inc.
Morris Birgit E.
Werner Frank E.
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