Organic compounds -- part of the class 532-570 series
Organic compounds
Carboxylic acids and salts thereof
Inventor
active
Chelation cleaning process for repairing photomasks
Cleaning process for phase shift masks
OPC-like repair method for attenuated phase shift masks
Process for the preparation of monohydrated sodium phenylpyruvat
Quartz damage repair method for high-end mask
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