4. Coating apparatus
  5. Gas or vapor deposition

Sakae Nakatsuka

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Method and apparatus for forming a film on an object to be...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method for forming metallic tungsten film

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate

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Method of manufacturing a processing apparatus

Metal working – Method of mechanical manufacture – Assembling or joining
Reexamination Certificate

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Shower head

Coating apparatus – Gas or vapor deposition
Patent

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Vacuum processing apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-315819

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