4. Optics: measuring and testing
  5. Of light reflection

S. Sohail H. Naqvi

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Diffracted light from latent images in photoresist for exposure

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Lens scatterometer system employing source light beam scanning m

Optics: measuring and testing – Of light reflection
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Simple CD measurement of periodic structures on photomasks

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Use of diffracted light from latent images in photoresist for op

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Patent

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