4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Ryu Nakano

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Method of forming fluorine-doped low-dielectric-constant...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Method of forming organosilicon oxide film and multilayer...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Purge step-controlled sequence of processing semiconductor...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2170894

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