4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Ryouji Hamasaki

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Method and apparatus for treating surface of semiconductor

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method and apparatus for treating surface of semiconductor

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Vacuum treatment system and its stage

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2064937

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