4. Heating
  5. Work chamber having heating means
  6. Having means by which work is progressed or moved mechanically

Russell Bowman

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Double-dome reactor for semiconductor processing

Coating processes – Coating by vapor – gas – or smoke
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In-situ measurement of a thin film deposited on a wafer

Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
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Spoked susceptor support for enhanced thermal uniformity of susc

Heating – Work chamber having heating means – Having means by which work is progressed or moved mechanically
Patent

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Profile ID: LFUS-PAI-P-1167211

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