4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Russell Black

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Heated and cooled vacuum chamber shield

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Heated and cooled vacuum chamber shield

Coating apparatus – Work surface shields – masks or protectors
Reexamination Certificate

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Non-planar magnet tracking during magnetron sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-1052175

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