4. Computer-aided design and analysis of circuits and semiconductor
  5. Design of semiconductor mask or reticle
  6. Manufacturing optimizations

Ru-Gun Liu

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Apparatus and method for immersion lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Complementary replacement of material

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Complementary replacement of material

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Immersion optical projection system

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
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Method for shape and timing equivalent dimension extraction

Miscellaneous hardware (e.g. – bushing – carpet fastener – caster – Checks and closers – Liquid
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Profile ID: LFUS-PAI-P-2251771

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