4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Ronald L. Kinder

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Method and apparatus for increasing local plasma density in...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Systems and methods for enhancing plasma processing of a...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Use of ultra-high magnetic fields in resputter and plasma...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Profile ID: LFUS-PAI-P-2212301

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