4. Abrading
  5. Precision device or process - or with condition responsive...
  6. Computer controlled

Ronald D. Fiege

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Determining angle of incidence with respect to workpiece

Optics: measuring and testing – Angle measuring or angular axial alignment – Apex of angle at observing or detecting station
Reexamination Certificate

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Flipping stage arrangement for reduced wafer contamination...

Optics: measuring and testing – Sample – specimen – or standard holder or support
Reexamination Certificate

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Piezo-actuated CMP carrier

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2133163

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