Determining angle of incidence with respect to workpiece

Details Determining angle of incidence with respect to workpiece Determining angle of incidence with respect to workpiece

2008-01-15

2010-06-22

Alsomiri, Isam (Department: 3662)

Optics: measuring and testing

Angle measuring or angular axial alignment

Apex of angle at observing or detecting station

C356S400000

Reexamination Certificate

active

07742160

ABSTRACT:
A method, system and computer program product for determining an angle of incidence of a light beam illuminating a workpiece positioned on a stage are disclosed. A method for determining an angle of incidence of a light beam illuminating a workpiece positioned on a stage may include: positioning a calibration target on the stage with multiple different tilts; first determining an angle of incident of the light beam with respect to the calibration target with each tilt using a detector; mapping a response of the detector to a determined angle of incidence; and second determining the angle of incidence with respect to the workpiece based on a result of the mapping.

REFERENCES:
patent: 5461237 (1995-10-01), Wakamoto et al.
patent: 6522776 (2003-02-01), Ehrichs
patent: 6556303 (2003-04-01), Rangarajan et al.
patent: 6687002 (2004-02-01), Stehle et al.
patent: 6707053 (2004-03-01), Togashi
patent: 6757056 (2004-06-01), Meeks et al.
patent: 2004/0227918 (2004-11-01), Kurosawa
patent: 2007/0229791 (2007-10-01), Inoue

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