Flipping stage arrangement for reduced wafer contamination...

Details Flipping stage arrangement for reduced wafer contamination... Flipping stage arrangement for reduced wafer contamination...

2007-07-03

2009-06-02

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

Sample, specimen, or standard holder or support

C356S237400, C356S369000, C356S614000, C356S600000

Reexamination Certificate

active

07542136

ABSTRACT:
A sample stage for performing measurements using an optical metrology system includes at least one sample section for retention of a sample, and components for controlling orientation of the sample section with relation to the optical metrology system. A method and a computer program product are provided.

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