4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Robot control

Roger Sarver

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Method and apparatus for stacking semiconductor wafers

Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus
Reexamination Certificate

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System and method for calibrating a wafer handling robot and...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Robot control
Reexamination Certificate

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System and method for cleaning a reactor chamber of a pump...

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2238835

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