Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Reexamination Certificate
2007-11-19
2010-11-02
Komakov, Michael (Department: 1714)
Cleaning and liquid contact with solids
Processes
Using solid work treating agents
C134S022100, C134S021000, C312S001000
Reexamination Certificate
active
07824500
ABSTRACT:
A system and a method are disclosed for cleaning a reactor chamber of a pump exhaust abatement system. During the cleaning of the reactor chamber a transparent protective shield is temporarily mounted on an opening of a cabinet that contains the reactor chamber. The transparent protective shield has apertures and associated glove mounts that allow protective gloves to be placed through the apertures. This allows a technician to have gloved access to clean the reactor chamber within the cabinet. The transparent protective shield protects the technician from exposure to pollutants during the time that the reactor chamber is being cleaned. The transparent protective shield is removed after the cleaning process has been completed.
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Birbach Naomi
Komakov Michael
National Semiconductor Corporation
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