4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Roger Morin

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Low-voltage source for narrow electron/ion beams

Radiant energy – Ion generation – Field ionization type
Patent

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Method of making self-aligned apertures

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-81417

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